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1 February 1991 Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range
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Abstract
We report on the fabrication of linear and circular reflective Bragg-Fresnel zone plates made by a multistep process using microfabrication technologies. The zone plate patterns were generated by electron beam lithography on a Mo/C triode sputtered multilayer interference mirror. The minimum zone size was 0.3 p.m wide. The pattern was transferred anisotropically into the multilayer by reactive ion etching in a fluorinated plasma. An intermediate metallic mask made by lift-off was used for the transfer process. The groove depth was monitored by following the reflectivity of the structure with a helium-neon laser during the etching process. The groove profile and dimensional control were considered.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chantal G. Khan Malek, T. Moreno, Philippe Guerin, F. R. Ladan, Jean-Rene Rivoira, and Robert J. Barchewitz "Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23231
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