1 February 1991 Interface characterization of XUV multilayer reflectors using HRTEM and x-ray and XUV reflectance
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Abstract
The structure of XUV multilayer coatings has been examined using high-resolution transmission electron microscopy. A variety of techniques have been used to measure the interface widths and the interface topography from the digitized TEM images and the results have been compared with X-ray and XUV reflectance measurements. It is found that the structural parameters measured from the TEM images and those deduced from reflectance are consistent in light of the probable systematic errors associated with the measurement and interpretation techniques.
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David L. Windt, David L. Windt, Robert Hull, Robert Hull, Warren K. Waskiewicz, Warren K. Waskiewicz, Jeffrey B. Kortright, Jeffrey B. Kortright, } "Interface characterization of XUV multilayer reflectors using HRTEM and x-ray and XUV reflectance", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23202; https://doi.org/10.1117/12.23202
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