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1 January 1991 Broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm
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A broadband Rh/C (50/50) multilayer coating was deposited on a blazed reflection grating replica sample. A calculation of possible materials and configurations showed that a 6-layer pair multilayer of rhodium/carbon or a 7 layer of nickel/carbon covered by 2 nm rhodium layer would give a factor of 6-10 increase in reflection efficiency depending on the roughness of the layer interfaces. Measurements with X-rays at wavelengths down to 0.4 nm on a Rh/C multilayer blazed grating combination showed a substantial increase in reflectivity with respect to a gold coated grating for a fixed angle of incidence of 1 deg.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Antonius J. F. den Boggende, Marcel P. Bruijn, Jan Verhoeven, H. Zeijlemaker, Eric J. Puik, and Howard A. Padmore "Broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991);

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