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1 January 1991 Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors
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Abstract
Tungsten, iron, and rhodium materials have been deposited alternatively with carbon and boron carbide by diode RF-sputtering. The multilayer performances have been measured at the carbon or boron K-alpha lines depending on the layer spacing. It is found that tungsten and iron provide multilayers with good optical quality and optimized layer densities. This is related to the amorphous character of the tungsten and iron layers which results in low intrinsic roughness and limited interdiffusion. The experimental reflectivity is a factor of 2/3 lower than the theoretical value for W/C multilayers at 44.7 A. Rhodium layers alternated with carbon are crystallized, which induces significant interface roughness and poor soft X-ray performances. It is concluded that boron-carbide-based multilayers always exhibit lower interface roughness than carbon-based ones.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pierre Boher, Philippe Houdy, P. Kaikati, Robert J. Barchewitz, L. J. Van Ijzendoorn, Zhigang Li, David J. Smith, and J. C. Joud "Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23312
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