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1 January 1991 Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction
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The lateral-periodicities of the surface and interfacial roughnesses of a multilayer- Bragg reflector which affect x-ray reflectivity have been examined using the x-ray rocking curve profile measurements and a stylus surface profilometer. Multilayered films have been fabricated by a proprietary sputtering technique. The x-ray rocking curve profiles of the first Bragg reflection of the multilayered films have been examined with a precision x-ray diffractometer. These profiles show that the lateral-periodicity of the film surface and interfacial roughness which primarily affect the CuKa X-ray reflectivity is about 4 rim. The measured CuKa x-ray reflectivity of the multilayered film is in good agreement with calculations which incorporate the estimated film surface and interfacial roughness. 1.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hisataka Takenaka and Yoshikazu Ishii "Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991);


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