1 January 1991 Penning discharge VUV and soft x-ray source
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A compact Penning discharge VUV and soft x-ray source has been developed. It consists of a water cooled brass anode two changeable cathode inserts and two permanent magnets to produce the necessary homogeneous magnetic field along the direction of discharge axis. Argon nitrogen and helium are used as working gases with the dynamic pressure centered at 5. 0 x103 Torr. Experiments of using different cathode inserts were carried out for determining the suitable cathodegas pair. The source can produce a great nurnbr of bright lines in the VUV and soft x-ray region from 50 to 1000 A. The most useful lines are however the highly ionized aluminum and magnesium (cathode inserts material) lines below 300 A. This source has been intensively employed in our research programs and the stability shown in these applications is better than 5 within an hour. 1.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianlin Cao, Jianlin Cao, Futian Li, Futian Li, Limin Qian, Limin Qian, Bo Chen, Bo Chen, Yueying Ma, Yueying Ma, Xingdan Chen, Xingdan Chen, } "Penning discharge VUV and soft x-ray source", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23303; https://doi.org/10.1117/12.23303

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