1 January 1991 Three materials soft x-ray mirrors: theory and application
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A periodic structure alternating three different materials has been investigated and fabricated using a diode RF-sputtering system. Reflectivity was optimized using the wave propagation method. It is concluded that the amorphous character of the rhodium layers is enhanced in the W/Rh/C structures, and good reflectivities have been obtained at the carbon K-alpha line with trilayer structures including a great number of periods (28 percent of reflectivity for 40 periods stack). Some reduction of the boron interdiffusion is observed in the W/Rh/C structures, which leads to better soft X-ray performances at the boron K-alpha line (19 percent of reflectivity for a 40 periods stack).
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pierre Boher, Pierre Boher, Louis Hennet, Louis Hennet, Philippe Houdy, Philippe Houdy, } "Three materials soft x-ray mirrors: theory and application", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23315; https://doi.org/10.1117/12.23315

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