1 October 1990 Direct laser writing of conductive pathways into diamond-like carbon films
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Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23697
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan
Abstract
Continuous wave laser microprocessing of diarrnd-1ike carbon films deposited on silicon is reported The conductive lines of 3-15 pm width with resistivity Lj . jo—2 ccm were formed into dielectric amcrphous film via its graphitization as evidenced by Rarnan spectroscopy. When the temperature within a laser spot rises up to 6000C the carbon oxidation starts, resulting in the film etching and the narrow channels formation The reflectivity in visible of the anneal ed DLC fi ims I s studied regarding them as a candidate for optical recording ridia.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. Yu. Armeyev, N. I. Chapliev, Vitali I. Konov, Victor G. Ralchenko, V. E. Strelnitsky, A. Yu Volkov, "Direct laser writing of conductive pathways into diamond-like carbon films", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23697; https://doi.org/10.1117/12.23697
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