Paper
1 October 1990 On the reaction kinetics in laser-induced chemical processing
Author Affiliations +
Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23729
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan
Abstract
Abstract not available.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dieter Baeuerle, K. Piglmayer, and Boris S. Luk'yanchuk "On the reaction kinetics in laser-induced chemical processing", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); https://doi.org/10.1117/12.23729
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KEYWORDS
Chemical lasers

Laser processing

Photolysis

Chemical vapor deposition

Diffusion

Etching

Laser applications

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