1 October 1990 Real-time mass-spectrometry of laser-induced chemical reactions
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Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23711
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan
Abstract
The principle of a setup for realtime mass-spectrometry of gas phase reactions is described. An orifice between the high pressure (about 200 Pa) reaction cell and the quadrupol mass spectrometer reduces the pressure and controls some important performance parameter. . With this method it is also possible to investigate the kinetics of laser-induced gas/surface reactions. Some results for C02laser-induced reactions in the system SF6/Si are presented. 1.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthias Rossberg, Vladimir K. Popov, E. Linke, "Real-time mass-spectrometry of laser-induced chemical reactions", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23711; https://doi.org/10.1117/12.23711
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