1 October 1990 UV laser photolysis of Mo(CO)6 and molybdenum film deposition
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Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23703
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan
Abstract
Abstract not available.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor N. Bagratashvili, Alexander V. Evseev, Sergey Valentinov Kamayev, Michael A. Markov, "UV laser photolysis of Mo(CO)6 and molybdenum film deposition", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23703; https://doi.org/10.1117/12.23703
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