1 January 1991 Design of reflective relay for soft x-ray lithography
Author Affiliations +
Proceedings Volume 1354, 1990 Intl Lens Design Conf; (1991) https://doi.org/10.1117/12.47916
Event: 1990 International Lens Design Conference, 1990, Monterey, CA, United States
An all-reflective unobscured flat-field low-distortion telecentric optical design has been developed for non-scanning reduction soft x-ray lithography application. 1. 0
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Michael Rodgers, J. Michael Rodgers, Tanya E. Jewell, Tanya E. Jewell, } "Design of reflective relay for soft x-ray lithography", Proc. SPIE 1354, 1990 Intl Lens Design Conf, (1 January 1991); doi: 10.1117/12.47916; https://doi.org/10.1117/12.47916


Design of compact fisheye lens with slope constrained Q type...
Proceedings of SPIE (September 24 2013)
Design of a testing compensator for F/3 hyperbolic mirror
Proceedings of SPIE (November 08 2010)
Orthogonal polynomials and tolerancing
Proceedings of SPIE (September 12 2011)
Reflection masks for soft x-ray projection lithography
Proceedings of SPIE (December 31 1991)
Optical Tolerancing For Diamond Turning Ogive Error
Proceedings of SPIE (October 10 1989)

Back to Top