Paper
1 March 1991 Novel optoelectronic devices and integrated circuits using epitaxial lift-off
Piet M. A. Demeester, Ivan K.A. Pollentier, Luc Buydens, Peter Van Daele
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Abstract
Epitaxial Lift-Off is a technology where a thin epitaxial film is removed from its substrate an grafted to another substrate. The problems encountered during this process will be described and an overview will be given of the devices and integrated circuits realised with this technique.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Piet M. A. Demeester, Ivan K.A. Pollentier, Luc Buydens, and Peter Van Daele "Novel optoelectronic devices and integrated circuits using epitaxial lift-off", Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); https://doi.org/10.1117/12.24326
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Epitaxial lateral overgrowth

Optoelectronic devices

Photonic integrated circuits

Integrated circuits

Thin films

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