Real-time x-ray studies of semiconductor device structures

Roy Clarke; Waldemar Dos Passos; Yi-Jen Chan; Dimitris Pavlidis; Walter P. Lowe; Brian G. Rodricks; Christine M. Brizard

doi:10.1117/12.47673

1 March 1991 Real-time x-ray studies of semiconductor device structures

Roy Clarke, Waldemar Dos Passos, Yi-Jen Chan, Dimitris Pavlidis, Walter P. Lowe, Brian G. Rodricks, Christine M. Brizard

Author Affiliations +

Proceedings Volume 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization; (1991) https://doi.org/10.1117/12.47673
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

We discuss the application of high-resolution x-ray diffractometry to studies of semiconductor heterostructures. A new technique has been devised which extends structural measurements into the time domain. Using x-ray synchrotron radiation in conjunction with dispersive optics and fast x-ray area detectors we have been able to study for the first time the structure of heterointerfaces undergoing thermal processing. The techniques are illustrated with results on the strain kinetics of SQW''s and ion-implanted InAli_As layers.

Citation Download Citation

Roy Clarke, Waldemar Dos Passos, Yi-Jen Chan, Dimitris Pavlidis, Walter P. Lowe, Brian G. Rodricks, and Christine M. Brizard "Real-time x-ray studies of semiconductor device structures", Proc. SPIE 1361, Physical Concepts of Materials for Novel Optoelectronic Device Applications I: Materials Growth and Characterization, (1 March 1991); https://doi.org/10.1117/12.47673

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available