1 February 1991 Nondestructive investigations of multilayer dielectrical coatings
Author Affiliations +
Proceedings Volume 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications; (1991) https://doi.org/10.1117/12.24473
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany
Abstract
The paper presents an approach to the nondestructive ellipsometric investigation and computer simulation of dielectric structures with known thicknesses. Three-dimensional profile studies of surface microrelief using an atomic force microscope are also considered. The proposed approach enables the examination of an optical waveguide''s sections and permits investigations of interferometric coatings and the numerical analysis of various multilayer dielectric systems.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander G. Shapiro, Igor V. Yaminsky, "Nondestructive investigations of multilayer dielectrical coatings", Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); doi: 10.1117/12.24473; https://doi.org/10.1117/12.24473
PROCEEDINGS
10 PAGES


SHARE
Back to Top