Integrated optics displacement sensor

Antonio d'Alessandro; Marco De Sario; Antonella D'Orazio; Vincenzo Petruzzelli

doi:10.1117/12.24708

1 February 1991 Integrated optics displacement sensor

Antonio d'Alessandro, Marco De Sario, Antonella D'Orazio, Vincenzo Petruzzelli

Proceedings Volume 1366, Fiber Optics Reliability: Benign and Adverse Environments IV; (1991) https://doi.org/10.1117/12.24708
Event: SPIE Microelectronic Interconnect and Integrated Processing Symposium, 1990, San Jose, United States

Abstract

Interferometric optical sensors have been shown to possess very high resolution due to the sensitivity of the optical path length to a variety of electrical, chemical and mechanical quantities. We present the design of an integrated optic microdisplacement sensor made of four single mode Ti:LiNbO3 channel waveguides on X-cut substrate shaped to form a semi-asymmetric X junction. The effects of the rotation of the waveguide axis with respect to the principal reference coordinate system and the influence of the fluctuations in the environment temperature have been accounted. The calculated effective index change is dnef/dT = 17.10-5oC-1 for EY-11 mode and dnef/dT = 5.3 .10-5 ° C-1 for Ex11 mode, respectively.

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Antonio d'Alessandro, Marco De Sario, Antonella D'Orazio, and Vincenzo Petruzzelli "Integrated optics displacement sensor", Proc. SPIE 1366, Fiber Optics Reliability: Benign and Adverse Environments IV, (1 February 1991); https://doi.org/10.1117/12.24708

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KEYWORDS

Sensors

Waveguides

Integrated optics

Refractive index

Fiber optics

Reliability

Dielectrics

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