Absolute interferometer for manufacturing applications

Michael R. Tucker; Eric R. Christenson

doi:10.1117/12.24757

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1 February 1991 Absolute interferometer for manufacturing applications

Michael R. Tucker, Eric R. Christenson

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Proceedings Volume 1367, Fiber Optic and Laser Sensors VIII; (1991) https://doi.org/10.1117/12.24757
Event: SPIE Microelectronic Interconnect and Integrated Processing Symposium, 1990, San Jose, United States

Abstract

A multiwave interferometer was developed for accurate measurements of absolute distance over distances on the order of inches. The principle of the device is based on using multiwave interferometry to create artificial wavelengths between 1 micron and 50 mm. Phase measurements for pairs of optical wavelengths are used to mathematically produce a phase measurement equal to that of a much longer 'equivalent' wavelength; if the pair of wavelengths are close together, a long equivalent wavelength is produced. Each optical wavelength is assigned to a distinct heterodyne frequency and is multiplexed onto the same measurement beam.

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Michael R. Tucker and Eric R. Christenson "Absolute interferometer for manufacturing applications", Proc. SPIE 1367, Fiber Optic and Laser Sensors VIII, (1 February 1991); https://doi.org/10.1117/12.24757

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