1 February 1991 MMIC compatible photodetector design and characterization
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Proceedings Volume 1371, High-Frequency Analog Fiber Optic Systems; (1991) https://doi.org/10.1117/12.24893
Event: SPIE Microelectronic Interconnect and Integrated Processing Symposium, 1990, San Jose, United States
Interdigitated photodetectors that are compatible with a standard commercial monolithic microwave integrated circuit (MMIC) process have been designed and characterized. A wide variety of interdigitated metal-semiconductor-metal designs were investigated by varying device geometry and type of contact (Schottky and ohmic). The Schottky photodetector devices exhibited quantum efficiencies between 40 percent and 50 percent with 3 dB bandwidths up to 12 GHz and dark currents less than 5 nA. The fastest device, having 0.5-micron fingers with 1.0-micron spacing, had a useful operating bandwidth up to 40 GHz. The impedance of the photodetectors was measured and equivalent circuit models were derived from the data.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kyle A. Dallabetta, Michael de la Chapelle, and Robert C. Lawrence "MMIC compatible photodetector design and characterization", Proc. SPIE 1371, High-Frequency Analog Fiber Optic Systems, (1 February 1991); doi: 10.1117/12.24893; https://doi.org/10.1117/12.24893


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