Silicon modulator for integrated optics

Giuseppe Cocorullo; Francesco G. Della Corte; Ivo Rendina; Antonello Cutolo

doi:10.1117/12.24964

1 February 1991 Silicon modulator for integrated optics

Giuseppe Cocorullo, Francesco G. Della Corte, Ivo Rendina, Antonello Cutolo

Proceedings Volume 1374, Integrated Optics and Optoelectronics II; (1991) https://doi.org/10.1117/12.24964
Event: SPIE Microelectronic Interconnect and Integrated Processing Symposium, 1990, San Jose, United States

Abstract

A coupled cavity Fabry-Perot silicon electro-optic modulator for X 3 and 1. 5 jun is proposed and analyzed. The modulator consists of alternated slabs with high (silicon) and low (Si02 or air) refractive iixlex arI can be realized by standard microelectronic technique. Varying the optical properties of the silicon slabs by carrier injection it is possible to modulate tl light intensity transmitted across the device. The small size and the low current values requiitd to drive it ai compatible with a small scale integration.

Citation Download Citation

Giuseppe Cocorullo, Francesco G. Della Corte, Ivo Rendina, and Antonello Cutolo "Silicon modulator for integrated optics", Proc. SPIE 1374, Integrated Optics and Optoelectronics II, (1 February 1991); https://doi.org/10.1117/12.24964

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