1 March 1991 Coating development for high-energy KrF excimer lasers
Author Affiliations +
Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25028
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States
Abstract
Damage resistant optical coatings are needed for cost effective beam delivery systems for high energy laser applications. At excimer wavelengths the photon energy either exceeds or is comparable to bandgap energies of most materials and limits the materials suitable for optical coatings. Other constraints are imposed by limits on near specular scatter and fluorine resistance for selected components.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James D. Boyer, Billie R. Mauro, Virgil E. Sanders, "Coating development for high-energy KrF excimer lasers", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25028; https://doi.org/10.1117/12.25028
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT


Back to Top