1 March 1991 Excimer laser fabrication of waveguide devices
Author Affiliations +
Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25026
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States
Abstract
The use of an excimer laser to process polymers for optical waveguide applications has several advantages in processing over conventional plasma etching. For multi level interconnects and resonant couplers this technique offers the only viable option for demanding geometries in acrylates and polyimides. In addition this process will added design flexibility over the current poled waveguide technique currently in ). Through proper choice of etch parameters waveguides have been formed with excellent sidewall definition in 2-3 micron geometries.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marc A. Stiller, "Excimer laser fabrication of waveguide devices", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25026; https://doi.org/10.1117/12.25026
PROCEEDINGS
6 PAGES


SHARE
Back to Top