The use of an excimer laser to process polymers for optical waveguide applications has several advantages in processing over conventional plasma etching. For multi level interconnects and resonant couplers this technique offers the only viable option for demanding geometries in acrylates and polyimides. In addition this process will added design flexibility over the current poled waveguide technique currently in ). Through proper choice of etch parameters waveguides have been formed with excellent sidewall definition in 2-3 micron geometries.
Marc A. Stiller,
"Excimer laser fabrication of waveguide devices", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25026; https://doi.org/10.1117/12.25026