1 March 1991 Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices
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Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25024
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States
Abstract
The precise control and high-resolution ablation capability inherent in excimer laser machining make it ideally suited for creating slots for passive alignment of optical fibers to planar channel waveguides as well as for direct waveguide-to-waveguide coupling. This paper describes KrF excimer laser generation of passive alignment coupling slots and the results achieved using this technique with Polyguid polymeric integrated optic system single and multimode waveguide coupling.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bruce L. Booth, Bruce L. Booth, James L. Hohman, James L. Hohman, Kenneth B. Keating, Kenneth B. Keating, Joseph E. Marchegiano, Joseph E. Marchegiano, Sandy L. Witman, Sandy L. Witman, } "Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25024; https://doi.org/10.1117/12.25024
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