Progress in gas purifiers for industrial excimer lasers

Graham A. Naylor; Andrew John Kearsley

doi:10.1117/12.25031

1 March 1991 Progress in gas purifiers for industrial excimer lasers

Graham A. Naylor, Andrew John Kearsley

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25031
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

New Results on the trapping efficiency of cryogenic gas purifiers indicate that efficiencies of over 95 can be obtained. High power industrial excimer lasers operate at high buffer gas pressures and use large volume discharge vessels. A prototype gas purifier offering a circulation flow rate and operating pressure twice that of a conventional gas purifier has been developed. The performance and applicability of this device to industrial excimer lasers will be discussed.

Citation Download Citation

Graham A. Naylor and Andrew John Kearsley "Progress in gas purifiers for industrial excimer lasers", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25031

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