Pulsed-laser deposition of oxides over large areas

James A. Greer; H. Jerrold Van Hook

doi:10.1117/12.25027

1 March 1991 Pulsed-laser deposition of oxides over large areas

James A. Greer, H. Jerrold Van Hook

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25027
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

Due to its short wavelength and high peak power the excimer laser has become the de facto choice for Pulsed Laser Deposition (PLD) of ceramic superconductors as well as other complex chemical compounds. This paper will describe a unique excimer-based laser deposition system which is capable of producing thin films of a variety of oxide compounds or other materials over large areas (up to 46 cm2). Well over a dozen chemical compounds have been deposited with this system for a wide variety of electronic applications. Also the PLD technique has been adapted to grow thin films on the internal surface of cored cylindrical substrates in order to form resonant microwave cavity structures. The uniformity morphology and electrical properties of films grown on both planar and cylindrical substrates will be discussed.

Citation Download Citation

James A. Greer and H. Jerrold Van Hook "Pulsed-laser deposition of oxides over large areas", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25027

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available