1 March 1991 Pulsed-laser deposition of oxides over large areas
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Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25027
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States
Due to its short wavelength and high peak power the excimer laser has become the de facto choice for Pulsed Laser Deposition (PLD) of ceramic superconductors as well as other complex chemical compounds. This paper will describe a unique excimer-based laser deposition system which is capable of producing thin films of a variety of oxide compounds or other materials over large areas (up to 46 cm2). Well over a dozen chemical compounds have been deposited with this system for a wide variety of electronic applications. Also the PLD technique has been adapted to grow thin films on the internal surface of cored cylindrical substrates in order to form resonant microwave cavity structures. The uniformity morphology and electrical properties of films grown on both planar and cylindrical substrates will be discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James A. Greer, H. Jerrold Van Hook, "Pulsed-laser deposition of oxides over large areas", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25027; https://doi.org/10.1117/12.25027

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