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1 March 1991 What industry needs in a high-power excimer laser
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Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25016
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States
Abstract
Scientific, or research excimer lasers have been around since tl1e mid- 1970s, and in the past few years industrial excimer lasers have started to evolve. This paper will address the demands of manufacturing operations on high power excimer lasers, 100 to 200 Watts, operating three shifts a day, seven days a week. The issues of durability, reliability, serviceability, and cost will be addressed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John R. Lankard Sr. "What industry needs in a high-power excimer laser", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25016
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