Translator Disclaimer
Paper
1 August 1991 Laser systems for precision micromachining
Author Affiliations +
Proceedings Volume 1391, Laser Technology III; (1991) https://doi.org/10.1117/12.57149
Event: Laser Technology III, 1990, Szczecin, Poland
Abstract
Two systems for laser precision micrornachining and some results of their work. are presented in this paper. These systems were de signed and constructed in the Institute of Microelectronics and Optoelectronics of Warsaw University of Technology.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marian Nowicki and Zygmunt J. Niechoda "Laser systems for precision micromachining", Proc. SPIE 1391, Laser Technology III, (1 August 1991); https://doi.org/10.1117/12.57149
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Laser micromachining of the miniature functional mechanisms
Proceedings of SPIE (December 09 2004)
Laser Marking Technology
Proceedings of SPIE (September 30 1985)
Comparison of laser regimes for stamp cleaning
Proceedings of SPIE (October 22 2001)
Laser system for micromachining of the materials
Proceedings of SPIE (January 23 2007)

Back to Top