1 March 1991 Process control sensor development for the automation of single-wafer processors
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Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991); doi: 10.1117/12.48945
Event: Processing Integration, 1990, Santa Clara, CA, United States
Abstract
A review of the progress in the selection and development of appropriate process control sensors for single wafer processor automation will be presented. Categories of sensors will be defmed and their use in process control described. Issues surrounding the development of key sensors will be discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jimmy W. Hosch, "Process control sensor development for the automation of single-wafer processors", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48945; https://doi.org/10.1117/12.48945
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KEYWORDS
Sensors

Semiconducting wafers

Process control

Environmental sensing

Process modeling

Calibration

Integrated circuits

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