PROCEEDINGS VOLUME 1393
PROCESSING INTEGRATION | 15 SEPTEMBER - 8 OCTOBER 1990
Rapid Thermal and Related Processing Techniques
Editor(s): Rajendra Singh, Mehrdad M. Moslehi
Editor Affiliations +
PROCESSING INTEGRATION
15 September - 8 October 1990
Santa Clara, CA, United States
Multiprocessing
Samuel C. Wood, Krishna C. Saraswat, J. Michael Harrison
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25690
Paul J. Rosser, P. Moynagh, Kevin B. Affolter
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25691
Avishay Katz
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25692
Rajendra Singh, Sanjai Sinha, Randhir P. S. Thakur, N. J. Hsu
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.48968
Mehrdad M. Moslehi
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.48969
Ahmad Kermani
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25695
Dielectrics, Silicides, Doping, and Process-Induced Defects
Atul B. Joshi, G. Q. Lo, Dennis Ku Shih, Dim-Lee Kwong
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25696
Stephen J. Pearton, Avishay Katz, Michael Geva
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25699
Fon-Shan Huang, W. S. Chen, Tzu-min Hsu
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25702
Byung-Jin Cho, Choong-Ki Kim
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25703
Charles B. Yarling, Sookap Hahn, David T. Hodul, Hisaaki Suga, Walter Lee Smith
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25704
Bouchaib BH Hartiti, Jean-Claude Muller, Paul Siffert, Thuong-Quat Vu
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25705
N. M. Kulkarni, Revati N. Kulkarni, Arvind D. Shaligram
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25706
Rapid Thermal Chemical Vapor Deposition
Yves I. Nissim, Jean Marie Moison, Francoise Houzay, F. Lebland, C. Licoppe, M. Bensoussan
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25707
D. T. Grider, Mehmet C. Ozturk, Jim J. Wortman, Michael A. Littlejohn, Y. Zhong
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25708
Kissoo H. Jung, T. Y. Hsieh, Dim-Lee Kwong, D. B. Spratt
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25709
James C. Sturm, P. V. Schwartz, Erwin J. Prinz, Charles W. Magee
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25710
Mehmet C. Ozturk, Y. Zhong, D. T. Grider, M. Sanganeria, Jim J. Wortman, Michael A. Littlejohn
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25711
Process Monitoring, Thermal Stress, Temperature Measurement, and other Equipment Issues
Mehrdad M. Moslehi
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25712
David Peyton, Hiroyuki Kinoshita, G. Q. Lo, Dim-Lee Kwong
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25713
James C. Sturm, Casper M. Reaves
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25714
Peter Vandenabeele, Karen Maex
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25715
Samuel C. Wood, Pushkar P. Apte, Tsu-Jae King, Mehrdad M. Moslehi, Krishna C. Saraswat
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25716
Jean-Marie R. Dilhac, Christian Ganibal, N. Nolhier, L. Amat
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25717
W. Andrew Keenan, Walter H. Johnson Sr., David T. Hodul, David Mordo
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25718
Yong Jin Lee, Ching-Hua Chou, Butrus T. Khuri-Yakub, Krishna C. Saraswat
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25719
Peter Vandenabeele, Karen Maex
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25721
Jean-Marie R. Dilhac, Christian Ganibal, J. Bordeneuve, B. Dahhou, L. Amat, Antoni Picard
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25722
Hyouk Lee, Young-Don Yoo, Hyun-Dong Shin, Youn Young Earmme, Choong-Ki Kim
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25723
Charles B. Yarling, Dawn-Marie Cook
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25724
Dielectrics, Silicides, Doping, and Process-Induced Defects
Bruha Raicu, W. Andrew Keenan, Michael I. Current, David Mordo, Roger Brennan
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25726
Rapid Thermal Chemical Vapor Deposition
R. Madarazo, A. G. Pedrine, Allison A. S. Sol, Vitor Baranauskas
Proceedings Volume Rapid Thermal and Related Processing Techniques, (1991) https://doi.org/10.1117/12.25727
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