1 April 1991 Economic impact of single-wafer multiprocessors
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Proceedings Volume 1393, Rapid Thermal and Related Processing Techniques; (1991) https://doi.org/10.1117/12.25690
Event: Processing Integration, 1990, Santa Clara, CA, United States
Single wafer multiprocessors generally in the form of cluster tools are gaining increasing importance in commercial semiconductor product manufacture. This paper describes potential cost-related and timerelated advantages that could come from the multipmcessors. Next hypothetical conventional and clusterbased fabs are simulated. The simulations results are discussed in terms of their evidence for the cost and time advantages of the fabs. One general conclusion is that cluster tools can be used to achieve very short throughput times at a premium cost per wafer. Finally based on the potential advantages and the simulation results three areas of non-process issues are discussed which will determine the extent of the multiprocessors'' economic utility. These areas are cost time and fab management related. 1
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Samuel C. Wood, Samuel C. Wood, Krishna C. Saraswat, Krishna C. Saraswat, J. Michael Harrison, J. Michael Harrison, "Economic impact of single-wafer multiprocessors", Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25690; https://doi.org/10.1117/12.25690

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