RTP temperature uniformity mapping

W. Andrew Keenan; Walter H. Johnson Sr.; David T. Hodul; David Mordo

doi:10.1117/12.25718

1 April 1991 RTP temperature uniformity mapping

W. Andrew Keenan, Walter H. Johnson Sr., David T. Hodul, David Mordo

Proceedings Volume 1393, Rapid Thermal and Related Processing Techniques; (1991) https://doi.org/10.1117/12.25718
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

This paper presents innovative software developed to help generate a temperature calibration curve and to mathematically manipulate and combine multi-point wafer maps. The software automatically applies the calibration curve to a map of film parameters to provide a quantitative map of temperature uniformity. Several process examples are presented to demonstrate the flexibility and convenience of the software. 1.

Citation Download Citation

W. Andrew Keenan, Walter H. Johnson Sr., David T. Hodul, and David Mordo "RTP temperature uniformity mapping", Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); https://doi.org/10.1117/12.25718

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