From VLSI to ULSI: the subhalf micron challenge

Pallab K. Chatterjee

doi:10.1117/12.25758

1 March 1991 From VLSI to ULSI: the sub-half-micron challenge

Pallab K. Chatterjee

Proceedings Volume 1394, Progress In High-Temperature Superconducting Transistors and Other Devices; (1991) https://doi.org/10.1117/12.25758
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Abstract not available.

Citation Download Citation

Pallab K. Chatterjee "From VLSI to ULSI: the sub-half-micron challenge", Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); https://doi.org/10.1117/12.25758

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available