High-Tc superconducting infrared bolometric detector

Barry E. Cole

doi:10.1117/12.25739

1 March 1991 High-T_c superconducting infrared bolometric detector

Barry E. Cole

Proceedings Volume 1394, Progress In High-Temperature Superconducting Transistors and Other Devices; (1991) https://doi.org/10.1117/12.25739
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Recent technological advances have made it possible to form arrays of small thin-film-based bolometric pixels integrated onto Si substrates containing both array addressing and readout electronics. These advances have made bolometer technology a potentially low-cost, high-sensitivity, high-yield staring detector technology for the near future. In this paper, the basic performance aspects of an IR microbolometer are described. The design of a high-performance pixel and the performance measurements on some initial devices are presented. The potential performance of two-dimensional arrays is discussed.

Citation Download Citation

Barry E. Cole "High-T_c superconducting infrared bolometric detector", Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); https://doi.org/10.1117/12.25739

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