Lau imaging

Steven L. Cartwright

doi:10.1117/12.25788

1 March 1991 Lau imaging

Steven L. Cartwright

Proceedings Volume 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90; (1991) https://doi.org/10.1117/12.25788
Event: Applications of Optical Engineering: Proceedings of OE/Midwest '90, 1990, Rosemont, IL, United States

Abstract

Gratings may be used to form images of objects illuminated with incoherent light. Under certain restrictions the object is either replicated in the image or a single filtered image is formed. This latter case has applications in microlithography. 1.

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Steven L. Cartwright "Lau imaging", Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); https://doi.org/10.1117/12.25788

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KEYWORDS

Imaging systems

Fourier transforms

Image filtering

Optical engineering

Optical filters

Spatial frequencies

Coherence (optics)

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