1 March 1991 Lau imaging
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Proceedings Volume 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90; (1991) https://doi.org/10.1117/12.25788
Event: Applications of Optical Engineering: Proceedings of OE/Midwest '90, 1990, Rosemont, IL, United States
Abstract
Gratings may be used to form images of objects illuminated with incoherent light. Under certain restrictions the object is either replicated in the image or a single filtered image is formed. This latter case has applications in microlithography. 1.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven L. Cartwright, Steven L. Cartwright, } "Lau imaging", Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); doi: 10.1117/12.25788; https://doi.org/10.1117/12.25788
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