Stability analysis of optomechanical components

Esther Kerbis; Rick L. Morrison; Thomas J. Cloonan; Maralene M. Downs

doi:10.1117/12.25844

1 March 1991 Stability analysis of optomechanical components

Esther Kerbis, Rick L. Morrison, Thomas J. Cloonan, Maralene M. Downs

Proceedings Volume 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90; (1991) https://doi.org/10.1117/12.25844
Event: Applications of Optical Engineering: Proceedings of OE/Midwest '90, 1990, Rosemont, IL, United States

Abstract

We have developed two methods for thermal and mechanical stability analysis of optical mounts and components. The methods are capable of detecting movements on the order of 1 pm. We present a description and evaluation of the two methods along with analysis results of a 3-axis positioning stage. 1.

Citation Download Citation

Esther Kerbis, Rick L. Morrison, Thomas J. Cloonan, and Maralene M. Downs "Stability analysis of optomechanical components", Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); https://doi.org/10.1117/12.25844

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