1 March 1991 Stability analysis of optomechanical components
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Proceedings Volume 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90; (1991) https://doi.org/10.1117/12.25844
Event: Applications of Optical Engineering: Proceedings of OE/Midwest '90, 1990, Rosemont, IL, United States
Abstract
We have developed two methods for thermal and mechanical stability analysis of optical mounts and components. The methods are capable of detecting movements on the order of 1 pm. We present a description and evaluation of the two methods along with analysis results of a 3-axis positioning stage. 1.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Esther Kerbis, Esther Kerbis, Rick L. Morrison, Rick L. Morrison, Thomas J. Cloonan, Thomas J. Cloonan, Maralene M. Downs, Maralene M. Downs, } "Stability analysis of optomechanical components", Proc. SPIE 1396, Applications of Optical Engineering: Proceedings of OE/Midwest '90, (1 March 1991); doi: 10.1117/12.25844; https://doi.org/10.1117/12.25844
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