1 February 1991 Discharge studies with a high-efficiency XeCl excimer laser
Author Affiliations +
Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25917
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain
Results on a high efficiency excimer laser operating according to the prepulse-mainpulsetechnique are reported. The laser volume of about 90 cm3 is X-ray preionized. The mainpulse obtained from a PFN is switched onto the discharge by means of a racetrack saturable inductor (magnetic switching)connected to the laser head with low inductance. Laser output energy has been measured as a function of gas mixture and delay between X-ray and prepulse.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Trentelman, M. Trentelman, G. B. Ekelmans, G. B. Ekelmans, Frederik A. van Goor, Frederik A. van Goor, Wilhelmus J. Witteman, Wilhelmus J. Witteman, } "Discharge studies with a high-efficiency XeCl excimer laser", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25917; https://doi.org/10.1117/12.25917


Timing of the x ray preionization of a discharge pumped...
Proceedings of SPIE (December 21 1998)
Design studies of a high-pulse excimer Eurolaser
Proceedings of SPIE (May 31 1990)
Recent progress towards multikilowatt output
Proceedings of SPIE (August 31 1991)
Long-pulse ArF and F2 excimer lasers
Proceedings of SPIE (January 24 2001)

Back to Top