1 February 1991 High-average power XeCl laser with surface corona-discharge preionization
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Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.26024
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain
Abstract
A new combination of a surface corona-discharge preionization (SCP) electrode with a spiker-sustainer circuit is investigated for the development of a high-average power XeCl excimer laser with high repetition rate. The investigation for single shot operation proves the potentialities of the combination scheme. The result of repetitive operation demonstrates the promising prospect as an excitation scheme of industrial high-power excimer 1aser.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Haruhiko Nagai, Kenyu Haruta, Yukio Sato, Masao Inoue, Akihiro Suzuki, "High-average power XeCl laser with surface corona-discharge preionization", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.26024; https://doi.org/10.1117/12.26024
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