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26 September 1978 A Review Of Optical Property Measurements Using Ellipsometry
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Proceedings Volume 0140, Optical Coatings: Applications and Utilization II; (1978) https://doi.org/10.1117/12.956267
Event: 1978 Technical Symposium East, 1978, Washington, D.C., United States
Abstract
The application of ellipsometry to optical measurement problems encountered in the optical coating industry will be discussed. Although ellipsometry has been demonstrated to be a sensitive and accurate technique for measuring the optical properties of surface films and bulk materials, it has not been widely used in this industry. Specific measurements that will be discussed are: thickness and optical constants of films, optical constants of bulk materials, and stress-birefringence. Special precautions and errors caused by thin film surface contaminants will be described. Finally the applicability of ellipsometry to in-situ measurements and deposition monitoring will be reviewed.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas H. Allen "A Review Of Optical Property Measurements Using Ellipsometry", Proc. SPIE 0140, Optical Coatings: Applications and Utilization II, (26 September 1978); https://doi.org/10.1117/12.956267
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