1 March 1991 Interferometer accuracy and precision
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Several optical errors present in interferometer systems are examined in detail. Optical cavity errors are typically the primary limitation on measurement accuracy. Secondary sources of error include imaging distortion and ray-mapping (slope) errors. The effect of phase modulation/processing errors on precision is briefly discussed. Some on- site errors (operator technique and environmental effects) are also examined. Rules of thumb for error estimation are presented when applicable. Specific quantitative analysis is based on the Zygo MARK IVxp phase measuring interferometer.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lars A. Selberg, Lars A. Selberg, } "Interferometer accuracy and precision", Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); doi: 10.1117/12.26110; https://doi.org/10.1117/12.26110

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