Laser scan microscope and infrared laser scan microcope: two important tools for device testing

Eberhard Ziegler

doi:10.1117/12.47843

1 March 1991 Laser scan microscope and infrared laser scan microcope: two important tools for device testing

Eberhard Ziegler

Author Affiliations +

Proceedings Volume 1400, Optical Fabrication and Testing; (1991) https://doi.org/10.1117/12.47843
Event: Singapore, 1990, -, Singapore

Abstract

The optical beam induced current (OBIC) produced in devices by a laser scan microscope (LSM) is used to localize hot spots, leakage currents, electrostatic discharge defects and weak points. The LSM also allows photoluminescence measurements with high spatial and energy resolution. Using the infrared laser scan microscope (IR LSM), defects in the metallization and latch-up sensitive region could be detected from the back of the device.

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Eberhard Ziegler "Laser scan microscope and infrared laser scan microcope: two important tools for device testing", Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); https://doi.org/10.1117/12.47843

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