Application of tunable diode lasers in control of high-pure-material technologies

Alexander I. Nadezhdinskii; Eugene V. Stepanov; Andrian I. Kouznetsov; Grigory G. Devyatykh; G. A. Maximov; V. A. Khorshev; S. M. Shapin

doi:10.1117/12.43834

1 July 1991 Application of tunable diode lasers in control of high-pure-material technologies

Alexander I. Nadezhdinskii, Eugene V. Stepanov, Andrian I. Kouznetsov, Grigory G. Devyatykh, G. A. Maximov, V. A. Khorshev, S. M. Shapin

Author Affiliations +

Proceedings Volume 1418, Laser Diode Technology and Applications III; (1991) https://doi.org/10.1117/12.43834
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States

Abstract

Diode laser spectrometer for trace molecules' analysis in high-pure volatile substances has been developed. Spectrometer is equipped with heated evacuated system for gas input and gas mixtures' preparation. Analytical parameters were estimated for water traces determination in oxygen, argon, and monogermane. Detection limit was equal to 8 ppb, 4 ppb, and 4 ppb respectively for these gas-matrixes with 1.5 m optical path length.

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Alexander I. Nadezhdinskii, Eugene V. Stepanov, Andrian I. Kouznetsov, Grigory G. Devyatykh, G. A. Maximov, V. A. Khorshev, and S. M. Shapin "Application of tunable diode lasers in control of high-pure-material technologies", Proc. SPIE 1418, Laser Diode Technology and Applications III, (1 July 1991); https://doi.org/10.1117/12.43834

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