1 July 1991 Application of tunable diode lasers in control of high-pure-material technologies
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Proceedings Volume 1418, Laser Diode Technology and Applications III; (1991) https://doi.org/10.1117/12.43834
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States
Abstract
Diode laser spectrometer for trace molecules' analysis in high-pure volatile substances has been developed. Spectrometer is equipped with heated evacuated system for gas input and gas mixtures' preparation. Analytical parameters were estimated for water traces determination in oxygen, argon, and monogermane. Detection limit was equal to 8 ppb, 4 ppb, and 4 ppb respectively for these gas-matrixes with 1.5 m optical path length.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander I. Nadezhdinskii, Alexander I. Nadezhdinskii, Eugene V. Stepanov, Eugene V. Stepanov, Andrian I. Kouznetsov, Andrian I. Kouznetsov, Grigory G. Devyatykh, Grigory G. Devyatykh, G. A. Maximov, G. A. Maximov, V. A. Khorshev, V. A. Khorshev, S. M. Shapin, S. M. Shapin, } "Application of tunable diode lasers in control of high-pure-material technologies", Proc. SPIE 1418, Laser Diode Technology and Applications III, (1 July 1991); doi: 10.1117/12.43834; https://doi.org/10.1117/12.43834
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