PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Diamond films grow on the anode of DC plasmas while only diamondlike carbon and graphite grow on the cathode. In situ plasma diagnostics were employed to investigate the plasma as a whole and the anode in particular. To this end, pure hydrogen and diamond-producing DC plasmas were studied with optical emission spectroscopy. The pure hydrogen plasmas were analyzed to determine the effect of critical deposition parameters on the visible structure of the plasma. Two methane/hydrogen plasmas were also examined, one of which produced a graphitic film, the other a diamond film. The visible structures of these plasmas differed in that the diamond-producing plasma exhibited evidence of an anode (substrate) glow while the graphite-producing plasma had no glow.
Linda S. Plano
"Optical emission spectroscopy of diamond-producing plasmas", Proc. SPIE 1437, Applied Spectroscopy in Material Science, (1 April 1991); https://doi.org/10.1117/12.45126
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Linda S. Plano, "Optical emission spectroscopy of diamond-producing plasmas," Proc. SPIE 1437, Applied Spectroscopy in Material Science, (1 April 1991); https://doi.org/10.1117/12.45126