A set-up for automated measurement of damage thresholds on UV optical components is presented, being part of the EUREKA program "High Power Excimer Lasers". It includes on-line monitoring of probe beam parameters as well as sample condition, using digital image processing techniques for both laser beam profiling and high sensitivity damage detection. The latter is performed with a video microscopy system by pixel-to-pixel comparison of the video frames taken before and after the test laser pulse.
K. Mann, K. Mann,
"Automated damage testing facility for excimer laser optics", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 143805 (1 November 1990); doi: 10.1117/12.2294414; https://doi.org/10.1117/12.2294414