1 November 1990 An error analysis of the Wyko TOPO noncontact surface profiler
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Abstract
An increasingly important tool in the characterization and measurement of optical materials and components in the Wyko TOPO Noncontact Surface Profiler. Optically, it consists of a low- to medium- power microscope in which the objective, depending upon the power, is a visible light interferometer of either Michelson, Mireau, or Linnik design. By integrating a detector array into the viewing system and attaching the reference arm of the interferometer to a piezoelectric transducer, the technique of surface profiling by phase shifting is accomplished by computer. The potential utility of this system to the investigator interested in the fundamental mechanisms of laser-induced damage is enormous, provided that the user is aware of its proper use and limitations. This paper is intended to act as a user's guide to the TOPO system in such cases and to document its precision and accuracy limitations given a variety of surface types and measurement configurations.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Van A. Hodgkin, Van A. Hodgkin, } "An error analysis of the Wyko TOPO noncontact surface profiler", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 14380O (1 November 1990); doi: 10.1117/12.2294433; https://doi.org/10.1117/12.2294433
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