1 November 1990 Damage resistant optical coatings prepared using high temperature, plasma chemical-vapor-deposition
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Multilayer dielectric optical coatings, nominally consisting of 1000 or more optical-quarterwave layers, have been prepared by reacting SiC14 and a halogenated dopant (e.g. GeCl4) with 02 in a microwave-driven plasma. The dopant concentration is such that the index difference (An) between adjacent quarterwave layers is about 0.02 or less. The deposition is carried out at high substrate temperatures (850 to 1100°C) producing a fully dense, fused silica coating. Surface damage thresholds of high reflectivity (HR) coatings prepared by this plasma process are comparable to those for fused silica. For example, at 1.06 p.m and 16-ns we measure surface damage thresholds greater than 45 J/cm2 compared to about 45-60 J/cm2 for super-polished optical fused silica.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. H. Campbell, J. H. Campbell, } "Damage resistant optical coatings prepared using high temperature, plasma chemical-vapor-deposition", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 143817 (1 November 1990); doi: 10.1117/12.2294452; https://doi.org/10.1117/12.2294452

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