Paper
1 November 1990 The evolution of molecular beam deposition (MBD) from laboratory to production usage
C. C. H. Hale
Author Affiliations +
Abstract
The use of molecular beam technology (MBD) under ultra high vacuum conditions (UHV) has proved to be a highly controllable process capable of producing dense films which are free of porosity, low in impurities and having bulk like optical properties. These distinctions are requisite for coatings which require a high laser damage threshold, low scatter and stable spectral characteristics. The application also lends itself to the formation of novel distributed Bragg reflectors (DBR) and rugate structures which require a highly controllable deposition process to form the many, often very thin, layers involved.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. C. H. Hale "The evolution of molecular beam deposition (MBD) from laboratory to production usage", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 143819 (1 November 1990); https://doi.org/10.1117/12.2294454
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