1 November 1990 The evolution of molecular beam deposition (MBD) from laboratory to production usage
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Abstract
The use of molecular beam technology (MBD) under ultra high vacuum conditions (UHV) has proved to be a highly controllable process capable of producing dense films which are free of porosity, low in impurities and having bulk like optical properties. These distinctions are requisite for coatings which require a high laser damage threshold, low scatter and stable spectral characteristics. The application also lends itself to the formation of novel distributed Bragg reflectors (DBR) and rugate structures which require a highly controllable deposition process to form the many, often very thin, layers involved.
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C. C. H. Hale, C. C. H. Hale, } "The evolution of molecular beam deposition (MBD) from laboratory to production usage", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 143819 (1 November 1990); doi: 10.1117/12.2294454; https://doi.org/10.1117/12.2294454
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